文献
J-GLOBAL ID:201302286405958320
整理番号:13A0676503
ナノフォトニックアレイの作製のための回折支援極端紫外線近接リソグラフィー
Diffraction-assisted extreme ultraviolet proximity lithography for fabrication of nanophotonic arrays
著者 (8件):
DANYLYUK Serhiy
(Chair for the Technol. of Optical Systems, RWTH Aachen Univ. and JARA-Fundamentals of Future Information Technol. ...)
,
KIM Hyun-su
(Chair for the Technol. of Optical Systems, RWTH Aachen Univ. and JARA-Fundamentals of Future Information Technol. ...)
,
BROSE Sascha
(Chair for the Technol. of Optical Systems, RWTH Aachen Univ. and JARA-Fundamentals of Future Information Technol. ...)
,
DITTBERNER Carsten
(Chair for the Technol. of Optical Systems, RWTH Aachen Univ. and JARA-Fundamentals of Future Information Technol. ...)
,
LOOSEN Peter
(Chair for the Technol. of Optical Systems, RWTH Aachen Univ. and JARA-Fundamentals of Future Information Technol. ...)
,
TAUBNER Thomas
(Inst. of Physics (IA) and JARA-Fundamentals of Future Information Technologies RWTH Aachen Univ., 52056 Aachen, DEU)
,
BERGMANN Klaus
(Fraunhofer Inst. for Laser Technol., Steinbachstrasse 15, 52074 Aachen, DEU)
,
JUSCHKIN Larissa
(Inst. of Physics, EUV Sources and Applications and JARA-Fundamentals of Future Information Technologies RWTH Aachen ...)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
31
号:
2
ページ:
021602-021602-6
発行年:
2013年03月
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)