文献
J-GLOBAL ID:201302287501119123
整理番号:13A0253123
ハイブリッド変調パルスパワーおよびパルスDCマグネトロンスパッタリングにより蒸着したCrSiNナノ複合被膜の構造と性質
Structure and properties of CrSiN nanocomposite coatings deposited by hybrid modulated pulsed power and pulsed dc magnetron sputtering
著者 (7件):
LIN Jianliang
(Advanced Coatings and Surface Engineering Lab. (ACSEL), Dep. of Metallurgical and Materials Engineering, Colorado ...)
,
WANG Bo
(Advanced Coatings and Surface Engineering Lab. (ACSEL), Dep. of Metallurgical and Materials Engineering, Colorado ...)
,
OU Yixiang
(Advanced Coatings and Surface Engineering Lab. (ACSEL), Dep. of Metallurgical and Materials Engineering, Colorado ...)
,
SPROUL William D.
(Advanced Coatings and Surface Engineering Lab. (ACSEL), Dep. of Metallurgical and Materials Engineering, Colorado ...)
,
SPROUL William D.
(Reactive Sputtering, Inc., 2152 Goya Place, San Marcos, CA 92078, USA)
,
DAHAN Isaac
(Nuclear Res. Center, Beer-Sheva 84190, ISR)
,
MOORE John J.
(Advanced Coatings and Surface Engineering Lab. (ACSEL), Dep. of Metallurgical and Materials Engineering, Colorado ...)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
216
ページ:
251-258
発行年:
2013年02月15日
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)