文献
J-GLOBAL ID:201302289120303001
整理番号:13A0353371
ALD法により調製したZnO膜の成長モード,光学的および機械的性質に及ぼす蒸着温度の影響
The influence of deposition temperature on growth mode, optical and mechanical properties of ZnO films prepared by the ALD method
著者 (9件):
YUAN N.y.
(Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou Univ., Changzhou 213164, CHN)
,
YUAN N.y.
(Jiangsu Key Lab. for Solar Cell Materials and Technol., Changzhou 213164, CHN)
,
WANG S.y.
(Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou Univ., Changzhou 213164, CHN)
,
TAN C.b.
(Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou Univ., Changzhou 213164, CHN)
,
WANG X.q.
(Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou Univ., Changzhou 213164, CHN)
,
WANG X.q.
(Jiangsu Key Lab. for Solar Cell Materials and Technol., Changzhou 213164, CHN)
,
CHEN G.g.
(Center for Micro/Nano Sci. and Technol., Jiangsu Univ., Zhenjiang 212013, CHN)
,
DING J.n.
(Center for Low-Dimensional Materials, Micro-Nano Devices and System, Changzhou Univ., Changzhou 213164, CHN)
,
DING J.n.
(Jiangsu Key Lab. for Solar Cell Materials and Technol., Changzhou 213164, CHN)
資料名:
Journal of Crystal Growth
(Journal of Crystal Growth)
巻:
366
ページ:
43-46
発行年:
2013年03月01日
JST資料番号:
B0942A
ISSN:
0022-0248
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)