文献
J-GLOBAL ID:201302291663820906
整理番号:13A0896424
集束マイクロ波Ar/CH4/H2プラズマジェットにより合成した超ナノ結晶ダイヤモンド膜の成長,構造,および透明性に対するCH4濃度の効果
Effect of CH4 concentration on the growth behavior, structure, and transparent properties of ultrananocrystalline diamond films synthesized by focused microwave Ar/CH4/H2 plasma jets
著者 (6件):
LIAO Wen-hsiang
(Dep. of Mechanical Engineering and Inst. of Manufacturing Technol., National Taipei Univ. of Technol., Taipei 106 ...)
,
LIAO Wen-hsiang
(Graduate Inst. of Mechanical and Electrical Engineering, National Taipei Univ. of Technol., Taipei 106, Taiwan)
,
LIN Chii-ruey
(Dep. of Mechanical Engineering and Inst. of Manufacturing Technol., National Taipei Univ. of Technol., Taipei 106 ...)
,
LIN Chii-ruey
(Graduate Inst. of Mechanical and Electrical Engineering, National Taipei Univ. of Technol., Taipei 106, Taiwan)
,
WEI Da-hua
(Dep. of Mechanical Engineering and Inst. of Manufacturing Technol., National Taipei Univ. of Technol., Taipei 106 ...)
,
WEI Da-hua
(Graduate Inst. of Mechanical and Electrical Engineering, National Taipei Univ. of Technol., Taipei 106, Taiwan)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
270
ページ:
324-330
発行年:
2013年04月01日
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)