文献
J-GLOBAL ID:201402223852464098
整理番号:14A0444163
光電子放出支援プラズマ増強化学蒸着によるダイヤモンド膜の低温合成
Low-temperature synthesis of diamond films by photoemission-assisted plasma-enhanced chemical vapor deposition
著者 (6件):
KAWATA Mayuri
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
,
OJIRO Yoshihiro
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
,
OGAWA Shuichi
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
,
MASUZAWA Tomoaki
(International Christian Univ., 3-10-2 Osawa, Mitaka 181-8585, JPN)
,
OKANO Ken
(International Christian Univ., 3-10-2 Osawa, Mitaka 181-8585, JPN)
,
TAKAKUWA Yuji
(Inst. of Multidisciplinary Res. for Advanced Materials, Tohoku Univ., 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, JPN)
資料名:
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
(Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films)
巻:
32
号:
2
ページ:
02B110-02B110-9
発行年:
2014年03月
JST資料番号:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)