文献
J-GLOBAL ID:201402269085829280
整理番号:13A1951565
周波数ドメイン低コヒーレンス干渉計による基板温度の高速測定
Rapid measurement of substrate temperatures by frequency-domain low-coherence interferometry
著者 (8件):
TSUTSUMI Takayoshi
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
OHTA Takayuki
(Dep. of Electrical and Electronic Engineering, Fac. of Sci. and Technol., Meijo Univ., 1-501 Shiogamaguchi ...)
,
ISHIKAWA Kenji
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
TAKEDA Keigo
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
KONDO Hiroki
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
SEKINE Makoto
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
HORI Masaru
(Dep. of Electrical Engineering and Computer Sci., Graduate School of Engineering, Nagoya Univ., Furo-cho, Chikusa-ku ...)
,
ITO Masafumi
(Dep. of Electrical and Electronic Engineering, Fac. of Sci. and Technol., Meijo Univ., 1-501 Shiogamaguchi ...)
資料名:
Applied Physics Letters
(Applied Physics Letters)
巻:
103
号:
18
ページ:
182102-182102-3
発行年:
2013年10月28日
JST資料番号:
H0613A
ISSN:
0003-6951
CODEN:
APPLAB
資料種別:
逐次刊行物 (A)
記事区分:
短報
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)