文献
J-GLOBAL ID:201502203437139405
整理番号:15A1230466
高マイクロ波電力と純粋窒素/メタン/水素プラズマを使ったナノ結晶ダイヤモンド膜の高速成長
High rate growth of nanocrystalline diamond films using high microwave power and pure nitrogen/methane/hydrogen plasma
著者 (9件):
TANG C.J.
(Dep. of Physics, I3N, Univ. of Aveiro, 3810-193 Aveiro, PRT)
,
TANG C.J.
(Dep. of Physics, Jiangsu Key Lab. for Advanced Functional Materials, Changshu Inst. of Technol., Changshu 215500, CHN)
,
FERNANDES A.J.S.
(Dep. of Physics, I3N, Univ. of Aveiro, 3810-193 Aveiro, PRT)
,
GRANADA Marco
(Dep. of Physics, I3N, Univ. of Aveiro, 3810-193 Aveiro, PRT)
,
LEITAO J.P.
(Dep. of Physics, I3N, Univ. of Aveiro, 3810-193 Aveiro, PRT)
,
PEREIRA S.
(Dep. of Physics, CICECO, Univ. of Aveiro, 3810-193 Aveiro, PRT)
,
JIANG X.F.
(Dep. of Physics, Jiangsu Key Lab. for Advanced Functional Materials, Changshu Inst. of Technol., Changshu 215500, CHN)
,
PINTO J.L.
(Dep. of Physics, I3N, Univ. of Aveiro, 3810-193 Aveiro, PRT)
,
YE H.
(School of Engineering and Applied Sci., Aston Univ., Aston Triangle, Birmingham B4 7ET, GBR)
資料名:
Vacuum
(Vacuum)
巻:
122
号:
PB
ページ:
342-346
発行年:
2015年12月
JST資料番号:
E0347A
ISSN:
0042-207X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)