文献
J-GLOBAL ID:201502204750164654
整理番号:15A0804404
磁化誘導結合プラズマにおけるプラズマパラメータの空間分布に関する研究
Study on spatial distribution of plasma parameters in a magnetized inductively coupled plasma
著者 (6件):
CHEONG Hee-woon
(Plasma Lab., Inter-University Semiconductor Res. Center, Dep. of Electrical and Computer Engineering, Seoul National ...)
,
LEE Woohyun
(Plasma Lab., Inter-University Semiconductor Res. Center, Dep. of Electrical and Computer Engineering, Seoul National ...)
,
KIM Ji-won
(Plasma Lab., Inter-University Semiconductor Res. Center, Dep. of Electrical and Computer Engineering, Seoul National ...)
,
WHANG Ki-woong
(Plasma Lab., Inter-University Semiconductor Res. Center, Dep. of Electrical and Computer Engineering, Seoul National ...)
,
KIM Hyuk
(Samsung Electronics Co., Banwol-dong, Hwaseong 445-701, KOR)
,
PARK Wanjae
(Tokyo Electron Miyagi Ltd., Taiwa-cho, Kurokawa-gun, Miyagi 981-3629, JPN)
資料名:
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films
(Journal of Vacuum Science & Technology. A. Vacuum, Surfaces and Films)
巻:
33
号:
4
ページ:
041304-041304-7
発行年:
2015年07月
JST資料番号:
C0789B
ISSN:
0734-2101
CODEN:
JVTAD6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)