文献
J-GLOBAL ID:201502207496861004
整理番号:15A1368270
ホールを増大するためグラフォエピタクシャルに方向付けた自己集合における表面エネルギー変調の実行
Implementation of surface energy modification in graphoepitaxy directed self-assembly for hole multiplication
著者 (10件):
DOISE Jan
(Dep. of Electrical Engineering (ESAT), KU Leuven, Kasteelpark Arenberg 10, B-3001 Heverlee, Belgium and Imec ...)
,
BEKAERT Joost
(Imec, Kapeldreef 75, B-3001 Heverlee, BEL)
,
CHAN Boon Teik
(Imec, Kapeldreef 75, B-3001 Heverlee, BEL)
,
GRONHEID Roel
(Imec, Kapeldreef 75, B-3001 Heverlee, BEL)
,
CAO Yi
(EMD Performance Materials Corp., 70 Meister Avenue, Somerville, New Jersey 08876)
,
HONG Sungeun
(EMD Performance Materials Corp., 70 Meister Avenue, Somerville, New Jersey 08876)
,
LIN Guanyang
(EMD Performance Materials Corp., 70 Meister Avenue, Somerville, New Jersey 08876)
,
FISHMAN Daniel
(Intel Corp., 2 Tzoran BLVD, Qiryat-Gat 82109, ISR)
,
CHAKK Yuli
(Intel Corp., 2 Tzoran BLVD, Qiryat-Gat 82109, ISR)
,
MARZOOK Taisir
(Intel Corp., 2 Tzoran BLVD, Qiryat-Gat 82109, ISR)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
33
号:
6
ページ:
06F301-06F301-9
発行年:
2015年11月
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)