文献
J-GLOBAL ID:201502208349131773
整理番号:15A0996461
Siにおけるレーザ誘起表面下改質の結晶構造
Crystal structure of laser-induced subsurface modifications in Si
著者 (8件):
VERBURG P. C.
(Univ. of Twente, Chair of Applied Laser Technol., Fac. of Engineering Technol., P.O. Box 217, 7500 AE, Enschede, NLD)
,
SMILLIE L. A.
(The Australian National Univ., Res. School of Physics and Engineering, 2601, Acton, ACT, AUS)
,
ROEMER G. R. B. E.
(Univ. of Twente, Chair of Applied Laser Technol., Fac. of Engineering Technol., P.O. Box 217, 7500 AE, Enschede, NLD)
,
HABERL B.
(The Australian National Univ., Res. School of Physics and Engineering, 2601, Acton, ACT, AUS)
,
HABERL B.
(Oak Ridge National Lab., Chemical and Engineering Materials Div., 37831, Oak Ridge, TN, USA)
,
BRADBY J. E.
(The Australian National Univ., Res. School of Physics and Engineering, 2601, Acton, ACT, AUS)
,
WILLIAMS J. S.
(The Australian National Univ., Res. School of Physics and Engineering, 2601, Acton, ACT, AUS)
,
HUIS IN ’T VELD A. J.
(Univ. of Twente, Chair of Applied Laser Technol., Fac. of Engineering Technol., P.O. Box 217, 7500 AE, Enschede, NLD)
資料名:
Applied Physics. A. Materials Science & Processing
(Applied Physics. A. Materials Science & Processing)
巻:
120
号:
2
ページ:
683-691
発行年:
2015年08月
JST資料番号:
D0256C
ISSN:
0947-8396
CODEN:
APHYCC
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)