文献
J-GLOBAL ID:201502214582323720
整理番号:15A1073427
高周波プラズマ支援化学蒸着法を用いて合成したa-C:H:SiOx膜の機械的特性評価
Mechanical characterization of a-C:H:SiOx coatings synthesized using radio-frequency plasma-assisted chemical vapor deposition method
著者 (11件):
BATORY D.
(Inst. of Materials Sci. and Engineering, Lodz Univ. of Technol., 1/15 Stefanowskiego St, 90-924 Lodz, POL)
,
BATORY D.
(Inst. for Nanomaterials, Advanced Technologies and Innovation, Technical Univ. of Liberec, 2 Studentska St, 461 17 ...)
,
JEDRZEJCZAK A.
(Inst. of Materials Sci. and Engineering, Lodz Univ. of Technol., 1/15 Stefanowskiego St, 90-924 Lodz, POL)
,
SZYMANSKI W.
(Inst. of Materials Sci. and Engineering, Lodz Univ. of Technol., 1/15 Stefanowskiego St, 90-924 Lodz, POL)
,
NIEDZIELSKI P.
(Inst. of Materials Sci. and Engineering, Lodz Univ. of Technol., 1/15 Stefanowskiego St, 90-924 Lodz, POL)
,
FIJALKOWSKI M.
(Inst. for Nanomaterials, Advanced Technologies and Innovation, Technical Univ. of Liberec, 2 Studentska St, 461 17 ...)
,
LOUDA P.
(Inst. for Nanomaterials, Advanced Technologies and Innovation, Technical Univ. of Liberec, 2 Studentska St, 461 17 ...)
,
KOTELA I.
(Dep. of Orthopedic Surgery and Traumatology, Central Res. Hospital of Ministry of Interior, 137 Woloska St., 02-507 ...)
,
KOTELA I.
(Inst. of Physiotherapy, The Jan Kochanowski Univ. of Humanities and Sciences, 19 IX Wiek’ow Kielc St. 25-317 Kielce, POL)
,
HROMADKA M.
(Dep. of Physics, Fac. of Applied Sciences, Univ. of West Bohemia, Univerzitni 8, CZ-30614 Plzen, CZE)
,
MUSIL J.
(Dep. of Physics, Fac. of Applied Sciences, Univ. of West Bohemia, Univerzitni 8, CZ-30614 Plzen, CZE)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
590
ページ:
299-305
発行年:
2015年09月01日
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)