文献
J-GLOBAL ID:201502220390772262
整理番号:15A1079246
改良型パルスレーザ蒸着法による5インチ直径Siウエハ上のBi3.15Nd0.85Ti3O12強誘電体薄膜の蒸着
Deposition of Bi3.15Nd0.85Ti3O12 ferroelectric thin films on 5-inch diameter Si wafers by a modified pulsed laser deposition method
著者 (12件):
LI S.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
,
LI S.
(School of Materials Sci. and Engineering, Xiangtan Univ., Hunan, Xiangtan 411105, CHN)
,
ZHONG X.L.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
,
ZHONG X.L.
(School of Materials Sci. and Engineering, Xiangtan Univ., Hunan, Xiangtan 411105, CHN)
,
JIA Y.R.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
,
WANG J.B.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
,
WANG J.B.
(School of Materials Sci. and Engineering, Xiangtan Univ., Hunan, Xiangtan 411105, CHN)
,
LI B.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
,
LI B.
(School of Materials Sci. and Engineering, Xiangtan Univ., Hunan, Xiangtan 411105, CHN)
,
TAN C.B.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
,
TAN C.B.
(School of Materials Sci. and Engineering, Xiangtan Univ., Hunan, Xiangtan 411105, CHN)
,
ZHOU Y.C.
(Key Lab. of Low Dimensional Materials and Application Technol. of Ministry of Education, Xiangtan Univ., Hunan ...)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
591
号:
PA
ページ:
126-130
発行年:
2015年09月30日
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)