文献
J-GLOBAL ID:201502262037870700
整理番号:15A0228378
ゲート絶縁体のための非晶質窒化アルミニウム薄膜の成膜及び特性評価
Deposition and characterization of amorphous aluminum nitride thin films for a gate insulator
著者 (16件):
OIKAWA H.
(Inst. of Materials Sci., Univ. of Tsukuba,1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
OIKAWA H.
(Tsukuba Nano-Tech Human Resource Dev. Program, Graduate School of Pure and Applied Sciences, Univ. of Tsukuba, 1-1-1 ...)
,
AKIYAMA R.
(Inst. of Materials Sci., Univ. of Tsukuba,1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
AKIYAMA R.
(Tsukuba Nano-Tech Human Resource Dev. Program, Graduate School of Pure and Applied Sciences, Univ. of Tsukuba, 1-1-1 ...)
,
KANAZAWA K.
(Inst. of Materials Sci., Univ. of Tsukuba,1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
KURODA S.
(Inst. of Materials Sci., Univ. of Tsukuba,1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
KURODA S.
(Tsukuba Nano-Tech Human Resource Dev. Program, Graduate School of Pure and Applied Sciences, Univ. of Tsukuba, 1-1-1 ...)
,
HARAYAMA I.
(Inst. of Applied Physics, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
HARAYAMA I.
(Tsukuba Nano-Tech Human Resource Dev. Program, Graduate School of Pure and Applied Sciences, Univ. of Tsukuba, 1-1-1 ...)
,
NAGASHIMA K.
(Inst. of Applied Physics, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
SEKIBA D.
(Inst. of Applied Physics, Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba, 305-8573, JPN)
,
SEKIBA D.
(Tandem Accelerator Complex, Res. Facility Center for Sci. and Technol., Univ. of Tsukuba, 1-1-1 Tennoudai, Tsukuba ...)
,
ASHIZAWA Y.
(Coll. of Sci. and Technol., Nihon Univ., 7-24-1 Narashinodai, Funabashi, 274-8501, JPN)
,
TSUKAMOTO A.
(Coll. of Sci. and Technol., Nihon Univ., 7-24-1 Narashinodai, Funabashi, 274-8501, JPN)
,
NAKAGAWA K.
(Coll. of Sci. and Technol., Nihon Univ., 7-24-1 Narashinodai, Funabashi, 274-8501, JPN)
,
OTA N.
(Tsukuba Nano-Tech Human Resource Dev. Program, Graduate School of Pure and Applied Sciences, Univ. of Tsukuba, 1-1-1 ...)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
574
ページ:
110-114
発行年:
2015年01月01日
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)