文献
J-GLOBAL ID:201502272190627267
整理番号:15A0440573
厚みのあるシリコンで製造したカンチレバータイプのマイクロヒータ
Cantilever-type microheater fabricated with thick silicon
著者 (5件):
MA Hongyu
(China Univ. of Mining and Technol., Res. Center for Internet of Things, National and Local United Engineering Lab ...)
,
WANG Wenjuan
(China Univ. of Mining and Technol., Res. Center for Internet of Things, National and Local United Engineering Lab ...)
,
DING Enjie
(China Univ. of Mining and Technol., Res. Center for Internet of Things, National and Local United Engineering Lab ...)
,
ZHAO Xiaohu
(China Univ. of Mining and Technol., Res. Center for Internet of Things, National and Local United Engineering Lab ...)
,
CHENG Tingting
(China Univ. of Mining and Technol., Res. Center for Internet of Things, National and Local United Engineering Lab ...)
資料名:
Microsystem Technologies
(Microsystem Technologies)
巻:
21
号:
4
ページ:
801-807
発行年:
2015年04月
JST資料番号:
W2056A
ISSN:
0946-7076
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)