文献
J-GLOBAL ID:201502282258411867
整理番号:15A0654149
熱ローラナノインプリントによる光引き出し構造の高速複製
High-speed replication of light-extraction structure with thermal roller nanoimprinting
著者 (5件):
TAKAHASHI K.
(Dep. of Mechanical Engineering, Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo ...)
,
NAGATO K.
(Dep. of Mechanical Engineering, Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo ...)
,
NAGATO K.
(Res. Fellow of Precursory Res. for Embryonic Sci. and Technol. (PRESTO), Japan Sci. and Technol. Agency (JST), JPN)
,
HAMAGUCHI T.
(Dep. of Mechanical Engineering, Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo ...)
,
NAKAO M.
(Dep. of Mechanical Engineering, Graduate School of Engineering, The Univ. of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo ...)
資料名:
Microelectronic Engineering
(Microelectronic Engineering)
巻:
141
ページ:
285-288
発行年:
2015年06月15日
JST資料番号:
C0406B
ISSN:
0167-9317
CODEN:
MIENEF
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)