文献
J-GLOBAL ID:201502285809997700
整理番号:15A0602701
LiNbO3膜の構造と特性に及ぼすスパッタリング条件の影響
Sputtering condition effect on structure and properties of LiNbO3 films
著者 (6件):
SUMETS M.
(Voronezh State Univ., Universitetskaya Square, 1, 394000, Voronezh, RUS)
,
SUMETS M.
(Univ. of Texas at Brownsville, Center of Gravitational Wave Astronomy, 80 Fort Brown, 78520, Brownsville, TX, USA)
,
KOSTYUCHENKO A.
(Voronezh State Univ., Universitetskaya Square, 1, 394000, Voronezh, RUS)
,
IEVLEV V.
(Voronezh State Univ., Universitetskaya Square, 1, 394000, Voronezh, RUS)
,
KANNYKIN S.
(Voronezh State Univ., Universitetskaya Square, 1, 394000, Voronezh, RUS)
,
DYBOV V.
(Voronezh State Univ., Universitetskaya Square, 1, 394000, Voronezh, RUS)
資料名:
Journal of Materials Science. Materials in Electronics
(Journal of Materials Science. Materials in Electronics)
巻:
26
号:
6
ページ:
4250-4256
発行年:
2015年06月
JST資料番号:
W0003A
ISSN:
0957-4522
CODEN:
JMTSAS
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)