文献
J-GLOBAL ID:201602217499263887
整理番号:16A0163967
ナノ結晶AlN薄膜の集合組織とDCマグネトロンスパッタリングにおける成長条件【Powered by NICT】
Texture of the nano-crystalline AlN thin films and the growth conditions in DC magnetron sputtering
著者 (9件):
Khan Shakil
(Dep. of Metallurgy and Materials Engineering, Pakistan Inst. of Engineering & Applied Sciences, Pakistan, Islamabad)
,
Shahid Muhammad
(Dep. of Nuclear Engineering, Pakistan Inst. of Engineering & Applied Sciences, Pakistan, Islamabad)
,
Mahmood A
(National Inst. of Laser and Optronics (NILOP), Pakistan, Islamabad)
,
Shah A
(National Inst. of Laser and Optronics (NILOP), Pakistan, Islamabad)
,
Ahmed Ishaq
(National Centre for Physics, Quaid-i-Azam Univ., Pakistan, Islamabad)
,
Mehmood Mazhar
(Dep. of Metallurgy and Materials Engineering, Pakistan Inst. of Engineering & Applied Sciences, Pakistan, Islamabad)
,
Aziz U
(National Inst. of Laser and Optronics (NILOP), Pakistan, Islamabad)
,
Raza Q
(National Inst. of Laser and Optronics (NILOP), Pakistan, Islamabad)
,
Alam M
(Dep. of Applied Physics, Pakistan Inst. of Engineering & Applied Sciences, Pakistan, Islamabad)
資料名:
Progress in Natural Science: Materials International
(Progress in Natural Science: Materials International)
巻:
25
号:
4
ページ:
282-290
発行年:
2015年
JST資料番号:
W0407A
ISSN:
1002-0071
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
中国 (CHN)
言語:
英語 (EN)