文献
J-GLOBAL ID:201602221239233069
整理番号:13A1254039
Theoretical analysis and concept demonstration of a novel MOEMS accelerometer based on Raman-Nath diffraction
著者 (3件):
Zhang Zuwei
(Microsystem Res. Center of Chongqing Univ. State Key Lab. of Fundamental Sci. on Micro/Nano-Device and System ...)
,
Wen Zhiyu
(Microsystem Res. Center of Chongqing Univ. State Key Lab. of Fundamental Sci. on Micro/Nano-Device and System ...)
,
Hu Jing
(Microsystem Res. Center of Chongqing Univ. State Key Lab. of Fundamental Sci. on Micro/Nano-Device and System ...)
資料名:
Journal of Semiconductors
(Journal of Semiconductors)
巻:
33
号:
4
ページ:
044005-1-044005-6
発行年:
2012年
JST資料番号:
C2377A
ISSN:
1674-4926
資料種別:
逐次刊行物 (A)
発行国:
中国 (CHN)
言語:
英語 (EN)