文献
J-GLOBAL ID:201602236398596650
整理番号:16A0638883
バルクFinFET技術におけるフィン形状とインプラントの最適化【Powered by NICT】
Optimization of fin profile and implant in bulk FinFET technology
著者 (17件):
Wu Y.-S.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Tsai C.-H.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Miyashita T.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Chen P.-N.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Hsu B.-C.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Wu P.-H.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Hsu H.-H.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Chiang C.-Y.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Liu H.-H.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Yang H.-L.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Kwong K.-C
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Chiang J.-C.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Lee C.-W.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Lin Y.-J.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Lu C.-A.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Lin C.-Y.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
,
Wu S.-Y.
(Taiwan Semiconductor Manufacturing Company Ltd., 168, Park Ave. 2, Hsinchu Science Park, Hsinchu, Taiwan, R.O.C.)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
VLSI-TSA
ページ:
1-2
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)