文献
J-GLOBAL ID:201602237726931048
整理番号:16A0976816
種々の温度でPECVDにより交差指電極マイクロスーパーキャパシタに関するグラフェン成長の構造解析【Powered by NICT】
Structural analysis of graphene growth on interdigital electrodes micro supercapacitor by PECVD at various temperatures
著者 (6件):
Abidin Hafzaliza Erny Zainal
(Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 UKM Bangi, Selangor, Malaysia)
,
Hamzah Azrul Azlan
(Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 UKM Bangi, Selangor, Malaysia)
,
Mohamed Mohd Ambri
(Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 UKM Bangi, Selangor, Malaysia)
,
Yunas Jumril
(Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 UKM Bangi, Selangor, Malaysia)
,
Majlis Burhanuddin Yeop
(Institute of Microengineering and Nanoelectronics (IMEN), Universiti Kebangsaan Malaysia (UKM), 43600 UKM Bangi, Selangor, Malaysia)
,
Abid Mohd Asyadi Azam Mohd
(Faculty of Manufacturing Engineering, Universiti Teknikal Malaysia (UTEM), 76100 Durian Tunggal, Melaka, Malaysia)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
ICSE
ページ:
328-331
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)