文献
J-GLOBAL ID:201602238873522952
整理番号:16A1336446
1×nmパターン形成用ナノインプリントリソグラフィーのオーバレイ改善
Overlay improvement in nanoimprint lithography for 1×-nm patterning
著者 (10件):
Fukuhara Kazuya
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Suzuki Masato
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Mitsuyasu Masaki
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Komukai Toshiaki
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Hatano Masayuki
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Kono Takuya
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Nakasugi Tetsuro
(Memory Technology Research and Development Center, Toshiba Corporation, 8, Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa-ken 2358522, Japan)
,
Lim Yonghyun
(Research and Development Division, SK hynix Inc., Icheon-si, Gyeonggi-do 17336, South Korea)
,
Jung Wooyung
(Research and Development Division, SK hynix Inc., Icheon-si, Gyeonggi-do 17336, South Korea)
,
Nakamae Koji
(Graduate School of Information Science and Technology, Osaka University, 1-5 Yamadaoka, Suita-shi, Osaka-fu 5650781, Japan)
資料名:
Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
(Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena)
巻:
34
号:
6
ページ:
06K405-06K405-5
発行年:
2016年11月
JST資料番号:
E0974A
ISSN:
2166-2746
CODEN:
JVTBD9
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)