文献
J-GLOBAL ID:201602242781834570
整理番号:16A1108199
新しい高出力HVM LPP-EUV光源の性能
PERFORMANCE OF NEW HIGH POWER HVM LPP-EUV SOURCE
著者 (15件):
MIZOGUCHI Hakaru
(Gigaphoton Inc., Kanagawa, JPN)
,
NAKARAI Hiroaki
(Gigaphoton Inc., Kanagawa, JPN)
,
ABE Tamotsu
(Gigaphoton Inc., Kanagawa, JPN)
,
NOWAK Krzysztof M
(Gigaphoton Inc., Kanagawa, JPN)
,
KAWASUJI Yasufumi
(Gigaphoton Inc., Kanagawa, JPN)
,
TANAKA Hiroshi
(Gigaphoton Inc., Kanagawa, JPN)
,
WATANABE Yukio
(Gigaphoton Inc., Kanagawa, JPN)
,
HORI Tsukasa
(Gigaphoton Inc., Kanagawa, JPN)
,
KODAMA Takeshi
(Gigaphoton Inc., Kanagawa, JPN)
,
SHIRAISHI Yutaka
(Gigaphoton Inc., Kanagawa, JPN)
,
YANAGIDA Tatsuya
(Gigaphoton Inc., Kanagawa, JPN)
,
YAMADA Tsuyoshi
(Gigaphoton Inc., Kanagawa, JPN)
,
YAMAZAKI Taku
(Gigaphoton Inc., Kanagawa, JPN)
,
OKAZAKI Shinji
(Gigaphoton Inc., Kanagawa, JPN)
,
SAITOU Takashi
(Gigaphoton Inc., Kanagawa, JPN)
資料名:
Proceedings of SPIE
(Proceedings of SPIE)
巻:
9776
ページ:
97760J.1-97760J.8
発行年:
2016年
JST資料番号:
D0943A
ISSN:
0277-786X
CODEN:
PSISDG
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)