文献
J-GLOBAL ID:201602289189137520
整理番号:16A1000496
マイクロアコースティックゾル噴霧(MASA)に基づいた薄膜堆積
Thin film deposition based on microacoustic sol atomization (MASA)
著者 (5件):
Winkler A.
(Leibniz Institute for Solid State and Material Research Dresden (IFW), SAWLab Saxony, Dresden, Germany)
,
Kirchner A.
(Leibniz Institute for Solid State and Material Research Dresden (IFW), Department for Superconducting Materials, Dresden, Germany)
,
Bergelt P.
(Leibniz Institute for Solid State and Material Research Dresden (IFW), SAWLab Saxony, Dresden, Germany)
,
Huehne R.
(Leibniz Institute for Solid State and Material Research Dresden (IFW), Department for Superconducting Materials, Dresden, Germany)
,
Menzel S.
(Leibniz Institute for Solid State and Material Research Dresden (IFW), SAWLab Saxony, Dresden, Germany)
資料名:
Journal of Sol-Gel Science and Technology
(Journal of Sol-Gel Science and Technology)
巻:
78
号:
1
ページ:
26-33
発行年:
2016年04月
JST資料番号:
W0812A
ISSN:
0928-0707
CODEN:
JSGTEC
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)