文献
J-GLOBAL ID:201702210995469567
整理番号:17A0452049
パラジウム表面改質SnO_2薄膜をベースにしたSAWガスセンサの水素ガス検出特性の研究【Powered by NICT】
The investigation of hydrogen gas sensing properties of SAW gas sensor based on palladium surface modified SnO2 thin film
著者 (5件):
Yang Liu
(College of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 210009, PR China)
,
Yin Chenbo
(College of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 210009, PR China)
,
Zhang Zili
(College of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 210009, PR China)
,
Zhou Junjing
(College of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 210009, PR China)
,
Xu Haihan
(College of Mechanical and Power Engineering, Nanjing Tech University, Nanjing 210009, PR China)
資料名:
Materials Science in Semiconductor Processing
(Materials Science in Semiconductor Processing)
巻:
60
ページ:
16-28
発行年:
2017年
JST資料番号:
W1055A
ISSN:
1369-8001
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)