文献
J-GLOBAL ID:201702212383758937
整理番号:17A1546325
種々の寸法と配置の金属管内のプラズマ浸漬イオン注入(と堆積)【Powered by NICT】
Plasma immersion ion implantation (and deposition) inside metallic tubes of different dimensions and configurations
著者 (5件):
Ueda M.
(Associated Laboratory of Plasma, National Institute for Space Research, Sao Jose dos Campos, SP, Brazil)
,
Silva C.
(Associated Laboratory of Plasma, National Institute for Space Research, Sao Jose dos Campos, SP, Brazil)
,
Silva C.
(Associated Laboratory of Materials and Sensors, National Institute for Space Research, Sao Jose dos Campos, SP, Brazil)
,
Santos N.M.
(Associated Laboratory of Plasma, National Institute for Space Research, Sao Jose dos Campos, SP, Brazil)
,
Souza G.B.
(State University of Ponta Grossa, Ponta Grossa, PR, Brazil)
資料名:
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms
(Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)
巻:
409
ページ:
202-208
発行年:
2017年
JST資料番号:
H0899A
ISSN:
0168-583X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)