文献
J-GLOBAL ID:201702212455863623
整理番号:17A0697995
S_2O_8~2~-Fe~2+系スラリーを用いたケミカルメカニカルポリシング(CMP)によって用意した原子的に円滑な窒化ガリウム(GaN)表面【Powered by NICT】
Atomically smooth gallium nitride surface prepared by chemical-mechanical polishing with S2O8 2 --Fe2+ based slurry
著者 (18件):
Shi Xiaolei
(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Shi Xiaolei
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Shi Xiaolei
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Zou Chunli
(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Zou Chunli
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Zou Chunli
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Pan Guoshun
(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Pan Guoshun
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Pan Guoshun
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Gong Hua
(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Gong Hua
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Gong Hua
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Xu Li
(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Xu Li
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Xu Li
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
,
Zhou Yan
(The State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China)
,
Zhou Yan
(Shenzhen Key Laboratory of Micro/Nano Manufacturing, Research Institute of Tsinghua University in Shenzhen, Shenzhen 518057, China)
,
Zhou Yan
(Guangdong Provincial Key Laboratory of Optomechatronics, Shenzhen 518057, China)
資料名:
Tribology International
(Tribology International)
巻:
110
ページ:
441-450
発行年:
2017年
JST資料番号:
E0409B
ISSN:
0301-679X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)