文献
J-GLOBAL ID:201702216127120300
整理番号:17A1238033
高分解能ガス監視システムにより分析した有機金属気相エピタクシー反応炉におけるトリメチルガリウムと付加物形成の分解【Powered by NICT】
Decomposition of trimethylgallium and adduct formation in a metalorganic vapor phase epitaxy reactor analyzed by high-resolution gas monitoring system
著者 (9件):
Nagamatsu Kentaro
(Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
,
Nitta Shugo
(Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
,
Ye Zheng
(Department of Electrical Engineering and Computer Science, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
,
Nagao Hirofumi
(MSI.TOKYO, INC., 1-3-10, Tobitakyu, Chofu 182-0036, Tokyo, Japan)
,
Miki Shinichi
(MSI.TOKYO, INC., 1-3-10, Tobitakyu, Chofu 182-0036, Tokyo, Japan)
,
Honda Yoshio
(Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
,
Amano Hiroshi
(Institute of Materials and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
,
Amano Hiroshi
(Akasaki Research Center, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
,
Amano Hiroshi
(Venture Business Laboratory, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Aichi, Japan)
資料名:
Physica Status Solidi. B. Basic Solid State Physics
(Physica Status Solidi. B. Basic Solid State Physics)
巻:
254
号:
8
ページ:
null
発行年:
2017年
JST資料番号:
C0599A
ISSN:
0370-1972
CODEN:
PSSBBD
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)