文献
J-GLOBAL ID:201702217728381659
整理番号:17A1421021
視射角蒸着によって成長させた単一シリコンナノ螺旋の引張挙動のその場観察【Powered by NICT】
In situ observation of tensile behavior in a single silicon nano-helix grown by glancing angle deposition
著者 (4件):
Sumigawa Takashi
(Department of Mechanical Engineering and Science, Kyoto University, Kyoto-daigaku-katsura, Nishikyo-ku, Kyoto 615-8540, Japan)
,
Chen Shaoguang
(Department of Mechanical Engineering and Science, Kyoto University, Kyoto-daigaku-katsura, Nishikyo-ku, Kyoto 615-8540, Japan)
,
Yukishita Tetsuya
(Department of Mechanical Engineering and Science, Kyoto University, Kyoto-daigaku-katsura, Nishikyo-ku, Kyoto 615-8540, Japan)
,
Kitamura Takayuki
(Department of Mechanical Engineering and Science, Kyoto University, Kyoto-daigaku-katsura, Nishikyo-ku, Kyoto 615-8540, Japan)
資料名:
Thin Solid Films
(Thin Solid Films)
巻:
636
ページ:
70-77
発行年:
2017年
JST資料番号:
B0899A
ISSN:
0040-6090
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)