文献
J-GLOBAL ID:201702217875649753
整理番号:17A0222784
有機金属前駆体からの官能化自己集合単分子層上のRuの光化学CVD
Photochemical CVD of Ru on functionalized self-assembled monolayers from organometallic precursors
著者 (9件):
Johnson Kelsea R.
(Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, USA)
,
Arevalo Rodriguez Paul
(Department of Materials Science and Engineering, University of Texas at Dallas, 800 W. Campbell Rd, Richardson, Texas 75080, USA)
,
Brewer Christopher R.
(Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, USA)
,
Brannaka Joseph A.
(Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, USA)
,
Shi Zhiwei
(Department of Materials Science and Engineering, University of Texas at Dallas, 800 W. Campbell Rd, Richardson, Texas 75080, USA)
,
Yang Jing
(Department of Materials Science and Engineering, University of Texas at Dallas, 800 W. Campbell Rd, Richardson, Texas 75080, USA)
,
Salazar Bryan
(Department of Chemistry and Biochemistry, University of Texas at Dallas, Richardson, Texas 75080, USA)
,
McElwee-White Lisa
(Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200, USA)
,
Walker Amy V.
(Department of Materials Science and Engineering, University of Texas at Dallas, 800 W. Campbell Rd, Richardson, Texas 75080, USA)
資料名:
Journal of Chemical Physics
(Journal of Chemical Physics)
巻:
146
号:
5
ページ:
052816-052816-9
発行年:
2017年02月07日
JST資料番号:
C0275A
ISSN:
0021-9606
CODEN:
JCPSA6
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)