文献
J-GLOBAL ID:201702218646940137
整理番号:17A0445500
アルミニウムおよびイットリウムの酸化物及びふっ化物の相対的スパッタリング速度【Powered by NICT】
Relative sputtering rates of oxides and fluorides of aluminum and yttrium
著者 (6件):
Kim Dae-Min
(Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology, Icheon 467-843, Republic of Korea)
,
Jang Mi-Ran
(Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology, Icheon 467-843, Republic of Korea)
,
Oh Yoon-Suk
(Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology, Icheon 467-843, Republic of Korea)
,
Kim Seongwon
(Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology, Icheon 467-843, Republic of Korea)
,
Lee Sung-Min
(Engineering Ceramics Center, Korea Institute of Ceramic Engineering and Technology, Icheon 467-843, Republic of Korea)
,
Lee Sang-Ho
(Greene Tweed & Co., Kulpsville, PA 19443, USA)
資料名:
Surface & Coatings Technology
(Surface & Coatings Technology)
巻:
309
ページ:
694-697
発行年:
2017年
JST資料番号:
D0205C
ISSN:
0257-8972
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)