文献
J-GLOBAL ID:201702218829839848
整理番号:17A0158775
MgO/CoFeB/Ta多層膜における垂直磁気異方性に及ぼすMgO厚さと粗さの影響【Powered by NICT】
Effects of MgO Thickness and Roughness on Perpendicular Magnetic Anisotropy in MgO/CoFeB/Ta Multilayers
著者 (5件):
Liu Yi
(School of Physics and Nuclear Energy Engineering, Beihang University)
,
Yu Tao
(School of Physics and Nuclear Energy Engineering, Beihang University)
,
Zhu Zhengyong
(Institute of Microelectronics, Chinese Academy of Sciences)
,
Zhong Huicai
(Integrated Circuit Advanced Process Center, Institute of Microelectronics, Chinese Academy of Sciences)
,
Zhu Kaigui
(School of Physics and Nuclear Energy Engineering, Beihang University)
資料名:
Chinese Physics Letters
(Chinese Physics Letters)
巻:
33
号:
10
ページ:
107804_01-107804_04
発行年:
2016年
JST資料番号:
W1191A
ISSN:
0256-307X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
中国 (CHN)
言語:
英語 (EN)