文献
J-GLOBAL ID:201702219086010497
整理番号:17A1358097
Au Au/CNTs接触をもつOhm接触型RF-MEMSスイッチ【Powered by NICT】
An ohmic contact type RF-MEMS switch having Au-Au/CNTs contacts
著者 (6件):
Kageyama Tomoaki
(Graduate School of Engineering, Tottori University, Japan)
,
Shinozaki Koichi
(Japan Aerospace Exploration Agency (JAXA), Tsukuba, Japan)
,
Zhang Lan
(Research Center for Ubiquitous MEMS and Microengineering, AIST, Tsukuba, Japan)
,
Lu Jian
(Research Center for Ubiquitous MEMS and Microengineering, AIST, Tsukuba, Japan)
,
Takaki Hideki
(Research Center for Ubiquitous MEMS and Microengineering, AIST, Tsukuba, Japan)
,
Lee Sang-Seok
(Graduate School of Engineering, Tottori University, Japan)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
NEMS
ページ:
287-290
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)