文献
J-GLOBAL ID:201702221249682093
整理番号:17A0884222
擬3次元微細構造のための反応拡散媒介フォトリソグラフィー【Powered by NICT】
Reaction-Diffusion-Mediated Photolithography for Designing Pseudo-3D Microstructures
著者 (4件):
Kim Ju Hyeon
(Department of Chemical and Biomolecular Engineering (BK21+ Program), KAIST, Daejeon, 305-701, Korea)
,
Je Kwanghwi
(Department of Chemical and Biomolecular Engineering (BK21+ Program), KAIST, Daejeon, 305-701, Korea)
,
Shim Tae Soup
(Department of Chemical Engineering and Department of Energy System Research, Ajou University, Suwon, 16499, Republic of Korea)
,
Kim Shin-Hyun
(Department of Chemical and Biomolecular Engineering (BK21+ Program), KAIST, Daejeon, 305-701, Korea)
資料名:
Small
(Small)
巻:
13
号:
17
ページ:
ROMBUNNO.201603516
発行年:
2017年
JST資料番号:
W2348A
ISSN:
1613-6810
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
ドイツ (DEU)
言語:
英語 (EN)