文献
J-GLOBAL ID:201702222010003463
整理番号:17A0697216
深さ回路は注入関連欠陥を明らかにするための分析を編集【Powered by NICT】
In-depth circuits edit analysis to reveal the implantation-related defect
著者 (4件):
Chen C.Q.
(Product, test and failure analysis, GLOBALFOUNDRIES Singapore Pte. Ltd, 60 Woodlands, Industrial Park D Street 2, Singapore 738406, Singapore)
,
Ang G.B.
(Product, test and failure analysis, GLOBALFOUNDRIES Singapore Pte. Ltd, 60 Woodlands, Industrial Park D Street 2, Singapore 738406, Singapore)
,
Lam Jeffrey
(Product, test and failure analysis, GLOBALFOUNDRIES Singapore Pte. Ltd, 60 Woodlands, Industrial Park D Street 2, Singapore 738406, Singapore)
,
Mai Z.H.
(Product, test and failure analysis, GLOBALFOUNDRIES Singapore Pte. Ltd, 60 Woodlands, Industrial Park D Street 2, Singapore 738406, Singapore)
資料名:
Microelectronics Journal
(Microelectronics Journal)
巻:
62
ページ:
38-42
発行年:
2017年
JST資料番号:
A0186A
ISSN:
0026-2692
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)