文献
J-GLOBAL ID:201702222292810602
整理番号:17A1550665
室温非真空プロセスによるp型SiとGaNの接触高仕事関数MoO_2とReO_2【Powered by NICT】
High work function MoO2 and ReO2 contacts for p-type Si and GaN by a room-temperature non-vacuum process
著者 (4件):
Lee Won-Jae
(Center for Electronic Materials, Korea Institute of Science and Technology (KIST), Seoul 02792, South Korea)
,
Parmar Narendra S.
(Center for Electronic Materials, Korea Institute of Science and Technology (KIST), Seoul 02792, South Korea)
,
Choi Ji-Won
(Center for Electronic Materials, Korea Institute of Science and Technology (KIST), Seoul 02792, South Korea)
,
Choi Ji-Won
(Department of Nanomaterials Science and Engineering, Korea University of Science and Technology (UST), Daejeon 34113, South Korea)
資料名:
Materials Science in Semiconductor Processing
(Materials Science in Semiconductor Processing)
巻:
71
ページ:
374-377
発行年:
2017年
JST資料番号:
W1055A
ISSN:
1369-8001
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)