文献
J-GLOBAL ID:201702223203755400
整理番号:17A0966360
残留応力の存在下でマイクロ光学機械圧力センサのモデリングと設計【Powered by NICT】
Modelling and design of Micro-Opto-Mechanical Pressure Sensors in the presence of residual stresses
著者 (12件):
Rochus V.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Jansen R.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Haouari R.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Figeys B.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Mukund V.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Verhaegen F.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Goyvaerts J.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Neutens P.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
O’ Callaghan J.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Stassen A.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Lenci S.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
,
Rottenberg X.
(Imec, Belgium, Kapeldreef 75, 3001 Leuven)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
EuroSimE
ページ:
1-5
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)