文献
J-GLOBAL ID:201702225110880734
整理番号:17A0855046
ITO薄膜抵抗温度検出器の作製と特性評価【Powered by NICT】
Fabrication and characterization of ITO thin film resistance temperature detector
著者 (10件):
Wang Yanlei
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, PR China)
,
Wang Yanlei
(Department of Microelectronics and Nanoscience, Shanghai Jiao Tong University, Shanghai, 200240, PR China)
,
Zhang Congchun
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, PR China)
,
Zhang Congchun
(Department of Microelectronics and Nanoscience, Shanghai Jiao Tong University, Shanghai, 200240, PR China)
,
Li Juan
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, PR China)
,
Li Juan
(Department of Microelectronics and Nanoscience, Shanghai Jiao Tong University, Shanghai, 200240, PR China)
,
Ding Guifu
(National Key Laboratory of Science and Technology on Micro/Nano Fabrication, PR China)
,
Ding Guifu
(Department of Microelectronics and Nanoscience, Shanghai Jiao Tong University, Shanghai, 200240, PR China)
,
Duan Li
(Key Laboratory for Thin Film and Micro Fabrication of the Ministry of Education, PR China)
,
Duan Li
(Department of Microelectronics and Nanoscience, Shanghai Jiao Tong University, Shanghai, 200240, PR China)
資料名:
Vacuum
(Vacuum)
巻:
140
ページ:
121-125
発行年:
2017年
JST資料番号:
E0347A
ISSN:
0042-207X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)