文献
J-GLOBAL ID:201702226164552719
整理番号:17A0829738
アセチレンとの熱フィラメントCVDによる非晶質炭素膜の特性に及ぼす基板温度と冷却法の研究【Powered by NICT】
Investigation of substrate temperature and cooling method on the properties of amorphous carbon films by hot-filament CVD with acetylene
著者 (6件):
Zhai Zihao
(College of Materials Science & Technology, Jiangsu Provincial Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics & Astronautics, 29 Yudao Street, Nanjing 210016, PR China)
,
Shen Honglie
(College of Materials Science & Technology, Jiangsu Provincial Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics & Astronautics, 29 Yudao Street, Nanjing 210016, PR China)
,
Shen Honglie
(Jiangsu Collaborative Innovation Center of Photovoltaic Science and Engineering, Changzhou University, Changzhou, 213164, PR China)
,
Chen Jieyi
(College of Materials Science & Technology, Jiangsu Provincial Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics & Astronautics, 29 Yudao Street, Nanjing 210016, PR China)
,
Jiang Ye
(College of Materials Science & Technology, Jiangsu Provincial Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics & Astronautics, 29 Yudao Street, Nanjing 210016, PR China)
,
Tang Quntao
(College of Materials Science & Technology, Jiangsu Provincial Key Laboratory of Materials and Technology for Energy Conversion, Nanjing University of Aeronautics & Astronautics, 29 Yudao Street, Nanjing 210016, PR China)
資料名:
Carbon
(Carbon)
巻:
117
ページ:
322-330
発行年:
2017年
JST資料番号:
H0270B
ISSN:
0008-6223
CODEN:
CRBNA
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)