文献
J-GLOBAL ID:201702226679390830
整理番号:17A1772432
大きな面内変位を用いたシェブロン電気-熱アクチュエータに基づいたSU-8マイクロピンセット【Powered by NICT】
An SU-8 micro-tweezer based on the chevron electro-thermal actuators with a large in-plane displacement
著者 (4件):
Voicu R-C.
(National Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, Bucharest-Voluntari, Romania)
,
Tibeica C.
(National Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, Bucharest-Voluntari, Romania)
,
Muller R.
(National Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, Bucharest-Voluntari, Romania)
,
Dinescu A.
(National Institute for Research and Development in Microtechnologies - IMT Bucharest, 126A, Erou Iancu Nicolae Street, Bucharest-Voluntari, Romania)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
CAS
ページ:
105-108
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)