文献
J-GLOBAL ID:201702227371960395
整理番号:17A1571022
電熱バイモルフ駆動に基づくMEMSミラーの特性評価と信頼性研究【Powered by NICT】
Characterization and reliability study of a MEMS mirror based on electrothermal bimorph actuation
著者 (5件):
Wang Haoran
(Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA)
,
Zhang Xiaoyang
(Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA)
,
Zhang Daihua
(School of Precision Instruments and Opto-electronics Engineering, Tianjin University, Tianjin, China)
,
Zhou Liang
(Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA)
,
Xie Huikai
(Department of Electrical and Computer Engineering, University of Florida, Gainesville, FL, USA)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2017
号:
OMN
ページ:
1-2
発行年:
2017年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)