文献
J-GLOBAL ID:201702228544096830
整理番号:17A1548706
微細加工加速度計の分解能を改善するための擬似静電ばね定数を用いた【Powered by NICT】
Using pseudo electrostatic spring constant to improve the resolution of micro-machined accelerometer
著者 (6件):
Xiong Xingyin
(Institute of Geology and Geophysics Chinese Academy of Sciences, Beijing, 100029, China)
,
Xiong Xingyin
(University of Chinese Academy of Sciences, Beijing, 100049, China)
,
Cong Ning
(Institute of Geology and Geophysics Chinese Academy of Sciences, Beijing, 100029, China)
,
Cong Ning
(University of Chinese Academy of Sciences, Beijing, 100049, China)
,
Li Zongwei
(Institute of Geology and Geophysics Chinese Academy of Sciences, Beijing, 100029, China)
,
Han Kedu
(Institute of Geology and Geophysics Chinese Academy of Sciences, Beijing, 100029, China)
資料名:
Sensors and Actuators. A. Physical
(Sensors and Actuators. A. Physical)
巻:
265
ページ:
187-192
発行年:
2017年
JST資料番号:
B0345C
ISSN:
0924-4247
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)