文献
J-GLOBAL ID:201702229550892976
整理番号:17A0364743
パルスレーザ蒸着により合成した窒化アルミニウム薄膜の微細構造に及ぼすレーザパルス周波数の影響【Powered by NICT】
Influence of laser pulse frequency on the microstructure of aluminum nitride thin films synthesized by pulsed laser deposition
著者 (8件):
Antonova K.
(Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko Chaussee 72, Sofia 1784, Bulgaria)
,
Duta L.
(National Institute for Lasers, Plasma, and Radiation Physics, 409 Atomistilor Street, 077125 Magurele, Romania)
,
Szekeres A.
(Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko Chaussee 72, Sofia 1784, Bulgaria)
,
Stan G.E.
(National Institute of Materials Physics, 105 bis Atomistilor Street, 077125 Magurele, Romania)
,
Mihailescu I.N.
(National Institute for Lasers, Plasma, and Radiation Physics, 409 Atomistilor Street, 077125 Magurele, Romania)
,
Anastasescu M.
(Institute of Physical Chemistry, “Ilie Murgulescu”, Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania)
,
Stroescu H.
(Institute of Physical Chemistry, “Ilie Murgulescu”, Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania)
,
Gartner M.
(Institute of Physical Chemistry, “Ilie Murgulescu”, Romanian Academy, 202 Splaiul Independentei, 060021 Bucharest, Romania)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
394
ページ:
197-204
発行年:
2017年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)