文献
J-GLOBAL ID:201702229975865308
整理番号:17A0212801
EWMAラン-ツ-ラン制御を用いた半導体製造プロセスにおけるモデル品質評価【Powered by NICT】
Model Quality Evaluation in Semiconductor Manufacturing Process With EWMA Run-to-Run Control
著者 (5件):
Zheng Ying
(National Key Laboratory of Science and Technology on Multispectral Information Processing, School of Automation, Huazhong University of Science and Technology, Wuhan, China)
,
Ling Dan
(National Key Laboratory of Science and Technology on Multispectral Information Processing, School of Automation, Huazhong University of Science and Technology, Wuhan, China)
,
Wang Yan-Wei
(School of Mechanical and Electrical Engineering, Wuhan Institute of Technology, Wuhan, China)
,
Jang Shi-Shang
(Department of Chemical Engineering, National Tsing Hua University, Hsinchu, Taiwan)
,
Tao Bo
(State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering, Huazhong University of Science and Technology, Wuhan, China)
資料名:
IEEE Transactions on Semiconductor Manufacturing
(IEEE Transactions on Semiconductor Manufacturing)
巻:
30
号:
1
ページ:
8-16
発行年:
2017年
JST資料番号:
T0521A
ISSN:
0894-6507
CODEN:
ITSMED
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)