文献
J-GLOBAL ID:201702230009613146
整理番号:17A1713293
ふっ素化DLC膜の軟X線照射効果【Powered by NICT】
Soft X-ray irradiation effect on the fluorinated DLC film
著者 (12件):
Takamatsu Hiroki
(Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Japan)
,
Niibe Masahito
(Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Japan)
,
Zhou XiaoLong
(Department of Materials Science and Technology, Nagaoka University of Technology, Japan)
,
Komatsu Keiji
(Department of Materials Science and Technology, Nagaoka University of Technology, Japan)
,
Saitoh Hidetoshi
(Department of Materials Science and Technology, Nagaoka University of Technology, Japan)
,
Akasaka Hiroki
(Department of Mechanical Engineering, Tokyo Institute of Technology, Japan)
,
Saiga Akihiro
(National Institute of Technology, Tokyo College, Japan)
,
Tamada Koji
(National Institute of Technology, Tokyo College, Japan)
,
Tagawa Masahito
(Graduate School of Engineering, Kobe University, Japan)
,
Yokota Kumiko
(Graduate School of Engineering, Kobe University, Japan)
,
Furuyama Yuichi
(School of Maritime Sciences, Kobe University, Japan)
,
Kanda Kazuhiro
(Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Japan)
資料名:
Diamond and Related Materials
(Diamond and Related Materials)
巻:
79
ページ:
14-20
発行年:
2017年
JST資料番号:
W0498A
ISSN:
0925-9635
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)