文献
J-GLOBAL ID:201702231009450286
整理番号:17A0472937
石英の異方性湿式エッチングのシミュレーションのための運動論的モンテカルロ法【Powered by NICT】
Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz
著者 (7件):
Zhang Hui
(Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, Dept. of Mechanical Engineering, Southeast University, Nanjing, China)
,
Xing Yan
(Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, Dept. of Mechanical Engineering, Southeast University, Nanjing, China)
,
Li Yuan
(Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, Dept. of Mechanical Engineering, Southeast University, Nanjing, China)
,
Gosalvez Miguel A.
(Dept. of Materials Physics, Univ. of the Basque Country UPV/EHU, 20018 Donostia-San Sebastian, Spain)
,
Gosalvez Miguel A.
(Centro de Fisica de Materiales, Centro Mixto CSIC-UPV/EHU, 20018 Donostia-San Sebastian, Spain)
,
Gosalvez Miguel A.
(Donostia International Physics Center (DIPC), 20018 Donostia - San Sebastian, Spain)
,
Qiu Xiaoli
(Jiangsu Key Laboratory for Design and Manufacture of Micro-Nano Biomedical Instruments, Dept. of Mechanical Engineering, Southeast University, Nanjing, China)
資料名:
Sensors and Actuators. A. Physical
(Sensors and Actuators. A. Physical)
巻:
256
ページ:
24-34
発行年:
2017年
JST資料番号:
B0345C
ISSN:
0924-4247
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)