文献
J-GLOBAL ID:201702232303868321
整理番号:17A0214380
アレイ操作のための複数ターゲット位置決め時間に及ぼす残留振動影響【Powered by NICT】
The residual vibration impact on the multiple target positioning time for array operation
著者 (5件):
Yang Zhijun
(Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, 510006, China)
,
Bai Youdun
(Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, 510006, China)
,
Chen Xin
(Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, 510006, China)
,
Guan Yisheng
(Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, 510006, China)
,
Feng Wenxian
(Guangdong Provincial Key Laboratory of Micro-nano Manufacturing Technology and Equipment, Guangdong University of Technology, Guangzhou, 510006, China)
資料名:
IEEE Conference Proceedings
(IEEE Conference Proceedings)
巻:
2016
号:
IEEE ICIA 2016
ページ:
50-55
発行年:
2016年
JST資料番号:
W2441A
資料種別:
会議録 (C)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)