文献
J-GLOBAL ID:201702232846612696
整理番号:17A1510385
低温プラズマ増強原子層堆積により成長させたAl_2O_3/HfO_2水分障壁膜を高度に不浸透性【Powered by NICT】
Highly-impermeable Al2O3/HfO2 moisture barrier films grown by low-temperature plasma-enhanced atomic layer deposition
著者 (11件):
Kim Lae Ho
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
,
Jang Jin Hyuk
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
,
Jeong Yong Jin
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
,
Kim Kyunghun
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
,
Baek Yonghwa
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
,
Kwon Hyeok-jin
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
,
An Tae Kyu
(Department of Polymer Science & Engineering and Department of IT Convergence, Korea National University of Transportation, Chungju, 27469, Republic of Korea)
,
Nam Sooji
(Smart I/O Control Device Research Section, Electronics and Telecommunications Research Institute, Daejeon, 34129, Republic of Korea)
,
Kim Se Hyun
(School of Materials Science and Engineering, Yeungnam University, Gyeongsan, 38541, Republic of Korea)
,
Jang Jaeyoung
(Department of Energy Engineering, Hanyang University, Seoul, 15588, Republic of Korea)
,
Park Chan Eon
(Polymer Research Institute, Department of Chemical Engineering, Pohang University of Science and Technology, Pohang, 37673, Republic of Korea)
資料名:
Organic Electronics
(Organic Electronics)
巻:
50
ページ:
296-303
発行年:
2017年
JST資料番号:
W1352A
ISSN:
1566-1199
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)