文献
J-GLOBAL ID:201702233447917255
整理番号:17A1057949
マイクロ構造化材料のフルエンス依存スパッタリング収率【Powered by NICT】
Fluence-dependent sputtering yield of micro-architectured materials
著者 (7件):
Matthes Christopher S.R.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
,
Ghoniem Nasr M.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
,
Li Gary Z.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
,
Matlock Taylor S.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
,
Goebel Dan M.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
,
Dodson Chris A.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
,
Wirz Richard E.
(Mechanical & Aerospace Engineering Department, University of California, Los Angeles, 420 Westwood Plaza, Los Angeles, CA 90095, United States)
資料名:
Applied Surface Science
(Applied Surface Science)
巻:
407
ページ:
223-235
発行年:
2017年
JST資料番号:
B0707B
ISSN:
0169-4332
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
オランダ (NLD)
言語:
英語 (EN)