文献
J-GLOBAL ID:201702233583056848
整理番号:17A1558667
複合ターゲットからのHPPMS堆積スパッタしたCr-Al-C薄膜の組成に及ぼす2桁ターゲット電力密度変化の影響【Powered by NICT】
HPPMS deposition from composite targets: Effect of two orders of magnitude target power density changes on the composition of sputtered Cr-Al-C thin films
著者 (11件):
Ruess H.
(Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, Aachen D-52074, Germany)
,
to Baben M.
(Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, Aachen D-52074, Germany)
,
to Baben M.
(GTT-Technologies, Kaiserstr. 103, Herzogenrath D-52134, Germany)
,
Mraz S.
(Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, Aachen D-52074, Germany)
,
Shang L.
(Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, Aachen D-52074, Germany)
,
Polcik P.
(Plansee Composite Materials GmbH, Siebenbuergerstr. 23, Lechbruck am See D-86963, Germany)
,
Kolozsvari S.
(Plansee Composite Materials GmbH, Siebenbuergerstr. 23, Lechbruck am See D-86963, Germany)
,
Hans M.
(Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, Aachen D-52074, Germany)
,
Primetzhofer D.
(Department of Physics and Astronomy, Uppsala University, Laegerhyddsvaegen 1, Uppsala S-75120, Sweden)
,
Schneider J.M.
(Materials Chemistry, RWTH Aachen University, Kopernikusstr. 10, Aachen D-52074, Germany)
,
Schneider J.M.
(Department of Physics and Astronomy, Uppsala University, Laegerhyddsvaegen 1, Uppsala S-75120, Sweden)
資料名:
Vacuum
(Vacuum)
巻:
145
ページ:
285-289
発行年:
2017年
JST資料番号:
E0347A
ISSN:
0042-207X
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
イギリス (GBR)
言語:
英語 (EN)