文献
J-GLOBAL ID:201702233651791030
整理番号:17A0470706
イオンビームによる光学部品の高精度加工のための高性能設備と技術【Powered by NICT】
High-performance facility and techniques for high-precision machining of optical components by ion beams
著者 (10件):
Chkhalo N.I.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Kaskov I.A.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Malyshev I.V.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Mikhaylenko M.S.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Pestov A.E.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Polkovnikov V.N.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Polkovnikov V.N.
(Nizhny Novgorod N.I. Lobachevskii State University, av. Gagarina, 23, 603950 Nizhny Novgorod, Russia)
,
Salashchenko N.N.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Toropov M.N.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
,
Zabrodin I.G.
(Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia)
資料名:
Precision Engineering
(Precision Engineering)
巻:
48
ページ:
338-346
発行年:
2017年
JST資料番号:
A0734B
ISSN:
0141-6359
資料種別:
逐次刊行物 (A)
記事区分:
原著論文
発行国:
アメリカ合衆国 (USA)
言語:
英語 (EN)